e-Cathode™ OEM Process Lid

The SCI e-Cathode™ OEM Lid can be purchased as a complete lid system (digital or analog) or scaled-back according to your requirements.
SCI provides OEM equipment builders complete turn-key solutions, ready to interface with their systems. We can provide as much controls integration as desired onboard the e-Cathode™.
 

FEATURES

Digital and Analog:

• Local and remote control
• Optional MFC, gas bar, and anode integration
• Full safety interlocks
• Customized discrete I/O connector
• High voltage, quick disconnect included
• User defined target-to-substrate distance

Digital Only:

• Integrated PLC and touch panel
• Real-time monitoring
• Advanced parameter monitoring
• Communicates via Ethernet, profibus, DH+ and more

Analog Only:

• Analog control interface
• Basic parameter monitoring
 

BENEFITS

• Speeds system design and integration
• Reduce cabling requirements